WORKSHOP ON TEXTURE IN ELECTRONIC APPLICATIONS Gaithersburg, MD October 10–11, 2000

نویسندگان

  • Mark D. Vaudin
  • Debra L. Kaiser
چکیده

Many components and devices in electronic systems are fabricated from materials that have a preferred crystallographic orientation or texture. The applications in which the texture of the material plays a key role in determining the properties and performance are broad: Al and Cu interconnects in integrated circuits, complex oxides in random access memory devices, and metallic alloys in magnetic recording media are but a few examples. Texture is established during the synthesis or post-synthesis heat treatment of a material and thus has a strong dependence upon processing history. Accurate [J. Res. Natl. Inst. Stand. Technol. 106, 605-608 (2001)]

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عنوان ژورنال:

دوره 106  شماره 

صفحات  -

تاریخ انتشار 2001